设计特点：
A. 内置电机可选，U型或平板型
B. 高刚度、更安全
C. 重复定位精度可达±0.5μm
D. 行程从100mm到1200mm
E. 分辨率可选0.1μm、0.05μm或SINCOS
F. 速度可达3m/s甚至更高
| DGH系列 | |||||
| 参数规格 | 电机 | 型号 | 持续推力 (Fcn)(N) | 峰值推力(Fpk)(N) | 有效行程(mm) |
| DGH150 | AJM | DGH150-AJM30-B2 | 68.1 | 214.7 | 100-1200 |
| DGH150-AJM30-B4 | 136.2 | 429.4 | |||
| AUM | DGH150-AUM2-S4 | 35.2 | 176.0 | ||
| DGH180 | AJM | DGH180-AJM50-B2 | 117.0 | 369.0 | |
| DGH180-AJM50-B4 | 234.0 | 738.1 | |||
| AUM | DGH180-AUM3-S2 | 57.0 | 289.0 | ||
| DGH180-AUM3-S4 | 113.0 | 578.0 | |||
| DHH200 | AJM | DGH200-AJM80-B2 | 174.5 | 550.2 | |
| DGH200-AJM80-B4 | 348.9 | 1100.4 | |||
| AUM | DGH200-AUM4-S2 | 110.0 | 624.0 | ||
| DGH200-AUM4-S4 | 221.0 | 1248.0 | |||
| DGH260 | AJM | DGH260-AJM100-B2 | 223.4 | 704.5 | |
| DGH260-AJM100-B4 | 446.8 | 1409.1 | |||
| AUM | DGH260-AUM5-S2 | 197.0 | 1415.0 | ||
| DGH系列 滑台刚度 | ||||||||
| 参数规格 | 电机 | 型号 | 正向朝下刚度 (N/µm) | 正向朝上刚度 (N/µm) | 横向刚度 (N/µm) | 翻滚刚度 (Nm/rad) | 俯仰刚度 (Nm/rad) | 偏航刚度 (Nm/rad) |
| DGH150 | AJM | DGH150-AJM30-B2 | 464.8 | 294.0 | 254.8 | 5.31E+05 | 1.06E+06 | 9.17E+05 |
| DGH150-AJM30-B4 | 464.8 | 294.0 | 254.8 | 5.31E+05 | 2.38E+06 | 2.06E+06 | ||
| AUM | DGH150-AUM2-S4 | 464.8 | 117.88 | 140.0 | 2.28E+05 | 2.26E+05 | 2.68E+05 | |
| DGH180 | AJM | DGH180-AJM50-B2 | 464.8 | 294.0 | 254.8 | 9.72E+05 | 1.06E+06 | 9.17E+05 |
| DGH180-AJM50-B4 | 464.8 | 294.0 | 254.8 | 9.72E+05 | 2.38E+06 | 2.06E+06 | ||
| AUM | DGH180-AUM3-S2 | 464.8 | 294.0 | 254.8 | 9.72E+05 | 1.06E+06 | 9.17E+05 | |
| DGH180-AUM3-S4 | 464.8 | 294.0 | 254.8 | 9.72E+05 | 2.38E+06 | 2.06E+06 | ||
| DGH200 | AJM | DGH200-AJM80-B2 | 464.8 | 294.0 | 254.8 | 1.38E+06 | 1.06E+06 | 9.17E+05 |
| DGH200-AJM80-B4 | 464.8 | 294.0 | 254.8 | 1.38E+06 | 1.06E+06 | 9.17E+05 | ||
| AUM | DGH200-AUM4-S2 | 464.8 | 294.0 | 254.8 | 1.38E+06 | 1.06E+06 | 9.17E+05 | |
| DGH200-AUM4-S4 | 464.8 | 294.0 | 254.8 | 1.38E+06 | 2.38E+06 | 2.06E+06 | ||
| DGH260 | AJM | DGH260-AJM100-B2 | 672.0 | 420.0 | 420.0 | 3.40E+06 | 1.51E+06 | 1.51E+06 |
| DGH260-AJM100-B4 | 672.0 | 420.0 | 420.0 | 3.40E+06 | 2.69E+06 | 2.69E+06 | ||
| AUM | DGH260-AUM5-S2 | 672.0 | 420.0 | 420.0 | 3.40E+06 | 2.69E+06 | 2.69E+06 | |
